Conveyance System for Semiconductor Factories

Conveyance System for Semiconductor Factory

Conveyance System for Semiconductor Factory transports silicon wafers in semiconductor factories. Our motor is applied for switching the track of AGV (Automatic Guided Vehicle) and for holding wafers.

Brushless Motor

To make the size of AGV smaller, our brushless motor with speed control driver is applied to a various conveyance systems for semiconductor factories. Because it is used in very clean environment, we used grease which does not generate outgas in inside of motor to not pollute wafers and applied a sealing additionally.

The exterior design is customized according to customers’ orders and request.

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