Conveyance System for Semiconductor Factories

Conveyance System for Semiconductor Factory transports silicon wafers in semiconductor factories. Our motor is applied for switching the track of AGV (Automatic Guided Vehicle) and for holding wafers.

To make the size of AGV smaller, our brushless motor with speed control driver is adopted to a various conveyance systems for semiconductor factories. Because it is used in very clean environment, grease which does not generate any outgas is used in inside of motor to not pollute wafers and a sealing is attached additionally.


The exterior design of the motor is customized with customers’ requested design.