Wafer Inspection Systems

Wafer Inspection System detects contaminations, or defects and errors, among circuit patterns on a silicon wafer by using SEM System or Dark Field System.

The semiconductor wafer inspection systems, which can not tolerate even a very tiny contamination or defect, also have various measures to optical systems.

Because our Linear Motor achieved to shed light on only specified places, and shutter structure for aperture filter to prevent ambient light, our Linear Motors are applied to this application.

Since our Linear Motor with compact design allows to install multiple axes in a small space, it made possible to focus on sizes and figures in wide variety. And also, because high-speed motion by direct driving is possible, it is suitable for semiconductor manufacturing line which requires high throughput.