Turbo Molecular Pumps

Turbo Molecular Pump (TMP) is one of mechanical molecular pumps. It exhausts gas by driving the rotor unit with metallic turbine vane in high speed and eject the molecule gas.

Since this application requires the high speed, our brushless motor is customized to a built-in type with very smooth revolution and low heat generation.

It is protected by carbon graphite or a case to prevent centrifugal destruction because the motor drives in high speed (30,000 to 40,000rpm). It drives smoothly by designing it by slotless structure.

And also, because the motor is installed to vacuum environment where does not transmit heat, it is designed to increase the heat radiation efficiency by adopting special mold with high thermal conductivity.